Nadim Maluf

MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.