Stephen A. Campbell

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Generalized (or pseudo-) inverse concepts routinely appear throughout applied mathematics and engineering, in both research literature and textbooks. Although the basic properties are readily available, some of the more subtle aspects and difficult details of the subject are not well documented or understood. This book is an excellent reference for researchers and students who need or want more than just the most basic elements. First published in 1979, the book remains up-to-date and readable; it includes chapters on Markov Chains and the Drazin inverse methods that have become significant to many problems in applied mathematics. Generalized Inverses of Linear Transformations provides comprehensive coverage of the mathematical theory of generalized inverses coupled with a wide range of important and practical applications that includes topics in electrical and computer engineering, control and optimization, computing and numerical analysis, statistical estimation, and stochastic processes.